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Researchers build 2D MoS2 transistors using coal-derived carbon dot dielectrics

Engineers used coal-derived carbon dots as a seed layer for atomic layer deposition, creating gate dielectrics with a 0.6-nanometre equivalent oxide thickness.

Researchers build 2D MoS2 transistors using coal-derived carbon dot dielectrics
Photo: nature.com

Engineers from the University of Illinois Urbana-Champaign and the National Energy Technology Laboratory have demonstrated top-gated two-dimensional transistors using carbon nanodots derived from bituminous coal, according to nature.com nature.comnature.comnature.comOpen source ↗. The researchers assembled these graphene-like dots into an atomically thin nucleation layer for the atomic layer deposition of hafnium dioxide onto molybdenum disulfide (MoS2) and graphene channels nature.comnature.comnature.comOpen source ↗. The resulting hybrid dielectric reached an equivalent oxide thickness (EOT) of 0.6 ± 0.1 nm, a leakage current density below 10⁻⁴ A·cm⁻², and a breakdown field of 28 MV·cm⁻¹ nature.comnature.comnature.comOpen source ↗.

Interfacial assembly and dielectric performance

Direct growth of high-κ gate dielectrics on two-dimensional materials is typically hindered by their chemically inert van der Waals surfaces, which lack dangling bonds to serve as nucleation centers nature.comnature.comnature.comOpen source ↗. Conventional seed layers often cause high interfacial roughness, decompose below 220 °C, or damage the underlying 2D channel nature.comnature.comnature.comOpen source ↗. To bypass these issues, the team applied carbon dots measuring 1 to 5 nm in diameter and approximately 0.4 nm in thickness from solution dispersions under mild conditions nature.comnature.comnature.comOpen source ↗. The carbon dots assembled into a dense monolayer that binds non-covalently without chemical hybridization, providing a thermal stability of at least 400 °C nature.comnature.comnature.comOpen source ↗.

Transistor characteristics and low-voltage logic

Top-gated MoS2 field-effect transistors built with the carbon dot/HfO2 dielectric bilayer showed a subthreshold swing approaching the thermionic limit of 60 mV·dec⁻¹ and a hysteresis below 30 mV nature.comnature.comnature.comOpen source ↗. The devices exhibited near-zero positive threshold voltages for enhancement-mode operation, with a narrow threshold distribution of 60 mV and bias-stress drift under 25 mV nature.comnature.comnature.comOpen source ↗. Leveraging this sub-nanometre EOT and interface stability, the authors fabricated multi-transistor logic circuits operating at a supply voltage of 0.5 V nature.comnature.comnature.comOpen source ↗.

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