# Zhongwei ships first Primo Matrix plasma wafer dicing tool to a Chinese chip packaging customer

- Published: 2026-11-10 15:08 UTC
- Section: Machines & Making › Manufacturing
- Tags: plasma wafer dicing, Primo Matrix, Zhongwei Semiconductor Equipment, advanced packaging, dual-station etching, 300 mm wafers, deep silicon etching, chip packaging equipment
- URL: https://realtech.media/news/rt-6c05755b91f214a911c8e701_zhongwei_ships_first/

**The dual-station tool handles 200 and 300 mm wafers, dicing lane widths down to 5 μm and thicknesses of 25–700 μm, according to the company.**

![Zhongwei ships first Primo Matrix plasma wafer dicing tool to a Chinese chip packaging customer](https://realtech.media/media/2026/11/02331e69fe2ab799.jpg)
*Diacritica, Wikimedia Commons, CC BY-SA 3.0*

Zhongwei Semiconductor Equipment (Shanghai) Co. announced on 10 November that the first Primo Matrix dual-station plasma wafer dicing tool has been shipped to a major Chinese integrated circuit packaging customer, ithome.com reports [1]. The company describes the series as its own development in plasma dicing for advanced packaging [1].

Primo Matrix uses the plasma deep silicon etching technology of Primo TSV, which is proven in volume production, and combines a dual-station etch chamber with a wafer transfer module [1]. It handles framed 200 mm and 300 mm wafers, with 300 mm as the main platform. The tool suits dicing lane widths down to 5 μm and wafer thicknesses of 25–700 μm [1].

Built on the Primo platform, the system can carry up to 6 etch stations [1]. It supports front-side plasma dicing of bumped wafers, plasma dicing after laser grooving and wafer backside etching. It can also etch openings in hard masks such as dielectric layers [1].

Over the next five years, the company plans to broaden its product range to cover about 60% of the high-end semiconductor equipment market and over 70% of the advanced packaging equipment market [1].

## Sources

1. [ithome.com](https://www.ithome.com/1/024/884.htm)

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Source: RealTech, realtech.media — https://realtech.media/news/rt-6c05755b91f214a911c8e701_zhongwei_ships_first/