# nanoGUNE team builds titanium nitride superinductor in silicon using standard CMOS process

- Published: 2026-11-09 02:23 UTC
- Section: Digital & Computing › Quantum technology
- Tags: superinductor, titanium nitride superinductor, CMOS quantum devices, silicon quantum circuit, kinetic inductance, spin qubit readout, single-electron transistor sensor, nanoGUNE, Quantum Motion
- URL: https://realtech.media/news/rt-623e8bbff36cc2c6893130df_nanogune_team_builds/

**Researchers from nanoGUNE, Quantum Motion and partner universities made a nonlinear superinductor in a silicon circuit with commercial CMOS fabrication, as reported in Nature Electronics.**

![nanoGUNE team builds titanium nitride superinductor in silicon using standard CMOS process](https://realtech.media/media/2026/11/31cba618aa3ac000.jpg)
*tech.yahoo.com*

An international team that includes the Quantum Hardware research group at nanoGUNE, working with Quantum Motion, the London Center for Nanotechnology, Imperial College London and the University of Cambridge, has built a superinductor integrated in a silicon circuit. According to tech.yahoo.com, which covers the study published in Nature Electronics, the device was made with the same commercial complementary metal-oxide-semiconductor (CMOS) process that is used for standard transistors [1]. The authors say this will enable scalable manufacturing of quantum technologies [1].

## Titanium nitride and the CMOS process

Superinductors are devices engineered for large inductance values, and they are in demand across quantum computing and the development of advanced quantum circuits. In high-impedance circuits with low inductive energy scales, a large inductance strongly changes the quantum behavior of the circuit [1].

The team used titanium nitride (TiN) for the superconducting circuit elements. TiN has high kinetic inductance, which allows compact elements with high inductance while keeping robust superconductivity [1].

Quantum devices are usually made with bespoke techniques developed in specialized laboratories, which has made it hard to produce such components at scale. The authors showed that these superconducting elements can be made with commercial CMOS mass-manufacturing processes, the same methods used for conventional computer chips. This points to a route for making complex quantum devices at existing commercial foundries, without building new manufacturing infrastructure [1].

## Sensor demonstration and next steps

The researchers demonstrated a nonlinear superinductor embedded in a silicon circuit. This architecture can be used in radiofrequency single-electron transistor sensors, which are widely used, highly sensitive sensors for reading the state of semiconductor spin qubits in a silicon integrated circuit. With the TiN superinductor, the sensor keeps a compact footprint and high sensitivity [1].

The group plans to use the resonator together with multi-gate transistors. The goal is to demonstrate high-speed, high-fidelity spin readout at timescales well below one microsecond. The team states that this speed is critical for error correction and reliable operation of future quantum circuits [1].

The authors also indicate possible uses beyond quantum computing and sensing with spin qubits, including radio astronomy, low-power cryoelectronics and quantum simulations [1].

## Sources

1. [tech.yahoo.com](https://tech.yahoo.com/science/articles/silicon-based-superinductor-could-advance-090737017.html)
2. [Interesting Engineering](https://interestingengineering.com/ai-robotics/superinductor-silicon-circuit-cmos)

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Source: RealTech, realtech.media — https://realtech.media/news/rt-623e8bbff36cc2c6893130df_nanogune_team_builds/